发明名称 Microelectromechanical component
摘要 Microelectromechanical component (1) providing filtering functions, produced on a semiconductor-based substrate, and comprising two input terminals and two output terminals, characterized in that it also comprises: a moveable element (4) connected to the substrate by at least one deformable portion, and including a region made of a ferromagnetic material; a metal coil (5) connected to the input terminals or output terminals (30, 31), capable of interacting magnetically with the ferromagnetic region of the moveable element (4); a surface forming a first electrode (6), connected to one of the output terminals or input terminals, placed opposite a complementary surface secured to the moveable element (4), this complementary surface forming a second electrode connected to the other of the output or input terminals, and being capable of interacting electrostatically with the first electrode (6).
申请公布号 US2003030998(A1) 申请公布日期 2003.02.13
申请号 US20020186332 申请日期 2002.06.28
申请人 MEMSCAP 发明人 MHANI AHMED;FEDELI JEAN-MARC
分类号 B81B7/02;H01H50/00;H01H59/00;H03H5/12;H03H9/02;H03H9/24;(IPC1-7):H05K7/02;H05K7/06;H05K7/08;H05K7/10 主分类号 B81B7/02
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