| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical switch, including a mirror array which can stably control the posture of a mirror, which expands a range in which the attitude control of the mirror is possible and prevent dielectric breakdown. SOLUTION: An optical switch changes, with an optical path switching means, the optical path of a light made incident from an incident port, and emits the light from an emission port. The optical path switching means contains a substrate, a hollow part, which is prepared in the substrate and one end of which has an opening on the surface of the substrate, a mirror fixed on the substrate so that the mirror is directed approximately parallel to the substrate surface and inclines around at least one rotation axis, and a supply means which supplies gas to the hollow part. The gas supplied to the hollow part is blown against the mirror through the opening and tilts the mirror about the rotation axis. |
