| 摘要 |
PROBLEM TO BE SOLVED: To obtain a method and an apparatus for the measurement of a shape wherein the shape of a specimen can be measured in a noncontact manner, at high speed and with high accuracy. SOLUTION: In the shape measuring apparatus by which the surface shape of the specimen having an aspheric shape is measured by using an interferometer, the specimen is irradiated with measuring light via an aspheric element arranged on the pupil face of an optical system used to make light incident on the specimen, the measuring light reflected and returned from the surface of the specimen is made to interfere with reference light, formed interference fringes are processed, and the shape of the specimen is measured.
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