发明名称 RADIATION SENSITIVE COMPOSITION WITH VARIABLE DIELECTRIC CONSTANT AND METHOD FOR VARYING DIELECTRIC CONSTANT
摘要 PROBLEM TO BE SOLVED: To provide such a radiation sensitive composition with a variable dielectric constant that the dielectric constant of the material can be varied by an easy method, the difference in the varied dielectric constant is sufficiently large, and a stable dielectric pattern or an optical material can be obtained without depending on the use conditions in the succeeding process. SOLUTION: The radiation sensitive composition with a variable dielectric constant contains (A) a decomposable polymer, (B) a non-decomposable polymer, (C) a radiation sensitive decomposing agent and (D) a stabilizer.
申请公布号 JP2003043682(A) 申请公布日期 2003.02.13
申请号 JP20010233520 申请日期 2001.08.01
申请人 JSR CORP 发明人 NISHIMURA ISAO;BESSHO NOBUO;KUMANO KOJI;YAMADA KENJI
分类号 G03F7/00;G03F7/004;G03F7/039;G03F7/075;G03F7/26;G03F7/38;H01L21/027;H01L21/312;H01L23/12;H05K1/00;H05K1/16 主分类号 G03F7/00
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