High temperature micro-machined valve

摘要

Micro-valves that include a diaphragm capable of being positioned on a valve seat or removed from the valve seat. The micro-valves also include supports and a cover that restrict the motion of the diaphragm, thereby reducing the possibility of cracking. Micro-valves made by anodically bonding the diaphragm to a seat substrate and anodically bonding the cover to the diaphragm. Micro-injectors that include micro-valves. Also, methods of making the micro-valves and micro-injectors.