| 发明名称 |
DWDM filter system design |
| 摘要 |
This invention provides a new DWDM filter deposition system, which uses quarter wavelength antenna and electron cyclotron resonance magnets to enhance the plasma density to improve the quality of DWDM filter.
|
| 申请公布号 |
US2003029716(A1) |
申请公布日期 |
2003.02.13 |
| 申请号 |
US20010929626 |
申请日期 |
2001.08.13 |
| 申请人 |
CHEN GA-LANE |
发明人 |
CHEN GA-LANE |
| 分类号 |
H05H1/46;C23C14/32;C23C14/34;C23C14/35;G02B5/28;H01J37/32;H01J37/34;(IPC1-7):G02F1/00 |
主分类号 |
H05H1/46 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
