发明名称 Semiconductor device and manufacturing method thereof
摘要 A transistor of a semiconductor device has an increased driving capacity. The semiconductor device has a first gate insulation film formed by a selective oxidation, a second gate insulation film formed by thermal oxidation and a gate electrode formed across the first and the second gate insulation films. The second gate insulation film is composed of a thicker gate insulation film and a thinner gate insulation film.
申请公布号 US2003032223(A1) 申请公布日期 2003.02.13
申请号 US20020215188 申请日期 2002.08.09
申请人 KIKUCHI SHUICHI;MOMEN MASAAKI 发明人 KIKUCHI SHUICHI;MOMEN MASAAKI
分类号 H01L21/336;H01L29/423;H01L29/78;(IPC1-7):H01L21/338 主分类号 H01L21/336
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