| 摘要 |
The invention relates to an excimer laser (10) which includes a source of a laser beam and one or more windows (16,18) which include barium fluoride. Another aspect of the invention relates to an excimer laser (10) which includes a source of a laser beam (11),one or more windows (16,18) which include barium fluoride and a source for annealing the one or more windows (16,18). Another aspect of the invention relates to a method of producing a predetermined narrow width laserbeam (11). |
