RUBBER SEAL MATERIAL FOR SEMICONDUCTOR HANDLING UNIT AND LIQUID CRYSTAL SUBSTRATE HANDLING UNIT, METHOD FOR PRODUCING THE SAME, AND SEMICONDUCTOR HANDLING UNIT AND LIQUID CRYSTAL SUBSTRATE HANDLING UNIT

摘要

PROBLEM TO BE SOLVED: To provide a rubber seal material for a semiconductor handling unit and a liquid crystal substrate handling unit which has a surface property to bring about no adhesion trouble of a microbubble and is excellent in durability; a method for producing the same; and a semiconductor handling unit and a liquid crystal substrate handling unit. SOLUTION: The rubber seal material for a semiconductor handling unit and a liquid crystal substrate handling unit is a fluororubber molding which contains 100 pts.wt. of a fluororubber and 0.01-10 pts.wt. of a silica powder and has a crosslink structure built by a polyamine-based crosslinking agent, wherein the material has a wrinkled and rugged microstructure on the surface and has been treated for hydrophilization by plasma irradiation.