发明名称 SCANNING PROBE MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To prevent lowering in lightness and contrast of a sample, generated by an optical element, when the sample is observed in prior art, and change in color information therein to shorten a measuring time. SOLUTION: The optical element OD is moved from an observation optical path L, when the sample is observed, and light from the sample 6 is made to reach an observation point VP without passing through the optical element OD. Disturbance to observation light is not generated thereby by the optical element OD in the observation, to prevent the lowering in the lightness and contrast of the sample 6, and changes in of the color information therein.
申请公布号 JP2003042927(A) 申请公布日期 2003.02.13
申请号 JP20010226954 申请日期 2001.07.27
申请人 SHIMADZU CORP 发明人 NAKAJIMA HIDEO;MORIOKA KAZU
分类号 G01B11/30;G01B21/30;G01Q10/02;G01Q10/04;G01Q20/02;G01Q60/24;G01Q90/00;(IPC1-7):G01N13/10;G01N13/16 主分类号 G01B11/30
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