| 摘要 |
A system and method for the fabrication of a fluid, gas and/or vacuum flow system (10) having a laminate gasket manifold (14) containing a plurality of bi-directional fluid-flow channels (22) therein. Initially, a photoimagable polyimide dry film resist layer (44) is applied to one or more stiffening elements (46) in order to form laminate sub-layers (42). The resist is then patterned to form a plurality of openings therein. Selectively, the laminate sub-layers are etched to form alignment apertures (18) therein. The resist-coated sub-layers (42) are then stacked such that the alignment apertures (18) therein are aligned to each other, respectively, to form bi-directional fluid-flow channels (22). Heat and pressure are then applied to the stack of laminate sub-layers (42) at 70-75 degrees C. in a vacuum laminator for 10 to 30 seconds. Additional parts, such as a silicon aperture structure (12) and a substrate, or mounting block (24), are bonded to the laminate gasket manifold (14) via a die bonder at 160 degrees C. for approximately five minutes. If such additional parts are added, forming a system (10), then the system (10) is cured via a post bake at 160 degrees C. for one hour utilizing a static pressure, such as a dead weight, in order to press all parts together. Thus, the post bake results in a complete cross-link of the bonding material (44), and may be applied to the laminate gasket manifold (14) should additional parts not be added.
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