发明名称 |
Coaxial illumination system |
摘要 |
A method and apparatus for combining the spectral outputs of multiple light sources to provide a high-efficiency broad-band illuminator for optical metrology is disclosed. The illuminator combines the output radiation from a plurality of broad-band lamps in a novel optical arrangement that creates a virtual source and avoids the use of beam-splitters. Consequently, the illuminator offers increased performance at reduced cost. The illuminator can be optimized and configured for application in a broad class of optical metrology instruments.
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申请公布号 |
US2003030799(A1) |
申请公布日期 |
2003.02.13 |
申请号 |
US20010927068 |
申请日期 |
2001.08.09 |
申请人 |
CHEN JIANHUI;AIKENS DAVID M. |
发明人 |
CHEN JIANHUI;AIKENS DAVID M. |
分类号 |
G01J3/10;(IPC1-7):G01J3/10 |
主分类号 |
G01J3/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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