发明名称 INSTALLATION DOCKING PEDESTAL FOR_WAFER FABRICATION EQUIPMENT
摘要 The present invention provides support apparatus for manufacturing equipment comprising a support pedestal having (1) a plurality of support legs, including at least one support leg aligned to each one of a plurality of load-bearing mounting feet found on the bottom of the manufacturing equipment to be supported by the pedestal, and a frame disposed on the plurality of support legs; and/or (2) a frame with an outline which substantially duplicates the bottom outline of the manufacturing equipment to be supported, and a plurality of support legs coupled to the frame. The support apparatus additionally may comprise at least one facilities connection locator fixedly mounted to the support frame so as to provide facilities connection locations for aligning facilities supply lines to the manufacturing equipment.
申请公布号 WO0236301(A3) 申请公布日期 2003.02.13
申请号 WO2001US45427 申请日期 2001.10.31
申请人 APPLIED MATERIALS, INC. 发明人 SCHAUER, RONALD;DAVIES, JOHN, CHARLES
分类号 B23Q1/01;H01L21/00 主分类号 B23Q1/01
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