| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a pressure detecting apparatus capable of accurately detecting external pressure over a long period. SOLUTION: This package for the pressure detecting apparatus is formed of an insulating substrate 1 and an insulating plate 2. The insulating substrate 1 comprises a mounting part 1b in which a semiconductor element 3 is mounted to one main surface, a first electrode 7 for forming electrostatic capacitance in the other main surface, a first electrode 7 for forming electrostatic capacitance in the other main surface, and a first metallized layer 8 for joining surrounding the first electrode 7. The insulating plate 2 comprises both a second electrode 9 for forming electrostatic capacitance in one main surface opposite to the first electrode 7 and a second metallized layer 10 for joining electrically connected to the second electrode 9 and brazed to the first metallized layer 8 for joining and is in a flexible state joined to the insulating substrate 1 in such a way as to form a sealed space in-between to the other main surface of the insulating substrate 1. In the insulating plate 2, a frame-shaped protrusion part 2a in contact with the other main surface of the insulating substrate 1 is formed between the second electrode 9 in the one main surface of the insulating plate 2 and the second metallized layer 10 for joining at a location inside of the first metallized layer 8 for joining.</p> |
