VALVE DEVICE FOR OPENING AND CLOSING PASSAGE

摘要

PURPOSE: A valve device is provided to smoothly control the flow of fluid without being affected by the pressure of the fluid by equipping an inner pressure control space portion and an inner pressure control fine fluid line. CONSTITUTION: A diaphragm(50) is installed in a plunger(12) of a solenoid(10). A space(30) is sealed between the diaphragm and the solenoid. A spring(32) is installed inside the space. A fine fluid line(35) flows the fluid in and out between an inlet of a valve device(100) and the space. In closing the valve device, the inner pressure of the flowed fluid in the space is maintained the balance with the fluid pressure to be applied to the diaphragm. Thereby, the flow of the fluid is controlled smoothly.