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发明名称
METHOD AND DEVICE FOR FEEDING ARSENIC DOPANT INTO A SILICON CRYSTAL GROWING PROCESS
摘要
申请公布号
EP1282733(A1)
申请公布日期
2003.02.12
申请号
EP20010924683
申请日期
2001.04.04
申请人
MEMC ELECTRONIC MATERIALS, INC.
发明人
CHERKO, CARL, F.;BANAN, MOHSEN;KULKARNI, MILIND
分类号
C30B29/06;C30B15/04;(IPC1-7):C30B15/04
主分类号
C30B29/06
代理机构
代理人
主权项
地址
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