COATING APPARATUS, COATING METHOD, PLASMA DISPLAY, METHOD FOR MANUFACTURING PLASMA DISPLAY, PROGRAM AND MEDIUM

摘要

PROBLEM TO BE SOLVED: To solve a problem that the uniform application of a coating material is difficult, for example, in the formation of the dielectric layer of PDP. SOLUTION: A coating apparatus is equipped with a nozzle 101 for coating a substrate 102 with the coating material 105 while relatively moved with respect to the substrate and a drive part 111 for pulling back the coating material 105 supplied to the nozzle 101. The coating material 105 supplied to the nozzle 101 is pulled back (1) and the supply of the coating material 105 to the nozzle 101 is stopped after the coating material 105 is pulled back (2).