| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic vacuum type cleaning device of which airtightness can be easily maintained without requiring particular attention by suppressing a pressure difference between the inside and the outside of main constituent parts, and between the main constituent parts and which is superior in safety from a fire and explosion, even when a combustible cleaning fluid is employed. SOLUTION: The device is provided with a cleaning vessel 6 having a storing vessel part 6a storing a cleaning solution 5 and accommodating a material to be cleaned 3 in the storing vessel part 6a, an ultrasonic vibrator unit 7 having a specified space 7a in the inside and giving ultrasonic vibration to the cleaning solution 5 in a vacuum container 1 capable of applying a vacuum condition, and the specified space 7a of the ultrasonic vibrator unit 7 is opened in the vacuum container 1 through a check valve 11 from an intake opening 10a.
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