CLAMP AND SEMICONDUCTOR FABRICATION APPARATUS HAVING THE SAME

摘要

PURPOSE: A clamp and a semiconductor fabrication apparatus having the same are provided to fix a wafer to a pedestal without concentrating a pressure on a flat zone of a wafer. CONSTITUTION: A clamp(200) has a shape of ring. The clamp(200) is contacted with an edge of a wafer(W2) since the clamp(200) has an inside diameter(D2) smaller than a diameter(D1) of the wafer(W2). The clamp(200) has a groove(H1) which is formed on a predetermined position corresponding to a flat zone(F2) of the wafer(W2) in order to minimize the area of a contact portion between the clamp(200) and the flat zone(F2) of the wafer(W2). The groove(H1) can be formed to expose the flat zone(F2). The pressure applied to the flat zone(F2) can be reduced since the clamp has the groove(H1).