| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate press wherein two layered substrate made to intervene a seal material between two sheets of upper and lower substrates is pressed under heating to form a strictly controlled gap between the upper and lower substrates, and the seal material is hardened to fix between the both substrates. SOLUTION: The two layered substrate 4 comprising the upper and lower substrates joined through the seal material is heated under heating between an upper side press member 11 and a lower side press member 12, and on the pressurizing face part of respective press boards 14, 15, elastic plate heaters 16, 17 in which an electric heating wire is embedded in a thin plate made of rubber or a synthetic resin are equipped in a closed state, and on the elastic plate heater, cushion materials 18, 19 are stuck. The elastic plate heater is a heating means, and on a press board, coolant paths 22, 23 to flow cooling water supplied from a cooling water tank 24 are provided so as to cool the elastic plate heater after it is heated to the hardening temperature or higher of the seal material.
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