| 摘要 |
Between the two coupling faces (18,20) of opposite substrates (17,18) are formed contact pairs (37), with each pair separately irradiated by laser energy. The laser radiation from a laser emitter (11) is deflected as a beam path (28), via a first swivel mirror unit (29) to a second one (30) and from the latter onto a contact pair. The substrate coupling faces are pressed together by a compression unit (14), between whose force initiator and a rear side (26) of the substrate (18) is provided a transparent, incompressible and deformable vol. |
