发明名称 Method for forming a semiconductor device having a DRAM region and a logic region on the substrate
摘要 A semiconductor device comprising a plurality of first transistors formed in a first region of a semiconductor substrate and a plurality of second transistors formed in a second region of the semiconductor substrate, wherein each of the first and second transistors has a gate electrode, a channel-forming region and source/drain regions; the gate electrodes constituting the first and second transistors are formed of a polysilicon layer containing an impurity and a silicide layer formed thereon; a silicide layer is formed in the source/drain regions constituting the first transistor; and no silicide layer is formed in the source/drain regions constituting the second transistor.
申请公布号 US6518130(B1) 申请公布日期 2003.02.11
申请号 US20000672876 申请日期 2000.09.29
申请人 SONY CORPORATION 发明人 OHNO KEIICHI
分类号 H01L21/8234;H01L21/8238;H01L21/8242;H01L27/088;H01L27/10;H01L27/108;(IPC1-7):H01L21/823 主分类号 H01L21/8234
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