发明名称 |
Cold trap assembly |
摘要 |
A temperature-controlled exhaust assembly with cold trap capability. One embodiment of the exhaust assembly comprises a multi-heater design which allows for independent multi-zone closed-loop temperature control. Another embodiment comprises a compact multi-valve uni-body design incorporating a single heater for simplified closed-loop temperature control. The cold trap incorporates a heater for temperature control at the inlet of the trap to minimize undesirable deposits. One embodiment also comprises a multi-stage cold trap and a particle trap. As a removable unit, this cold trap provides additional safety in the handling and disposal of the adsorbed condensables.
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申请公布号 |
US6517592(B2) |
申请公布日期 |
2003.02.11 |
申请号 |
US20000740120 |
申请日期 |
2000.12.19 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
UMOTOY SALVADOR P.;LEI LAWRENCE CHUNG-LAI;ELLWANGER RUSSELL C.;ROSE RONALD L.;HUSTON JOEL;CHEN JAMES JIN-LONG |
分类号 |
H01L21/02;B01D8/00;C23C16/44;H01L21/205;H01L21/285;H01L21/302;H01L21/3065;(IPC1-7):B01D45/08 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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