LEVITATION TRANSPORT FACILITY FOR MOTION OF ARTICLES INSIDE VACUUM SPACE

摘要

FIELD: application of coats in manufacture of electron articles. SUBSTANCE: transport facility includes trolley with substrates located inside vacuum chamber and permanent magnets with like poles directed towards each other forming transportation tracks; one of them is located on the outside under bottom of vacuum chamber and four of them are located inside vacuum chamber in corners of trolley for levitation; it is also provided with DC electromagnets located under bottom of vacuum chamber for step-by-step motion of trolley along route and avoiding its lateral displacement; they are controlled by means of automatic system with the aid of motion sensors furnishing signals on change of position of trolley; use is also made of tractive DC electromagnets provided with additional measuring windings fed from main at increased frequency; their magnetic flux is closed in pairs inside these windings and is directed perpendicularly relative to magnetic flux of tractive electromagnet. EFFECT: improved quality of applied films. 2 cl, 4 dwg