发明名称 APPARATUS FOR INSPECTING LEAKAGE OF WORK, CHAMBER FOR LEAKAGE-INSPECTING APPARATUS AND METHOD FOR INSPECTING LEAKAGE
摘要 PROBLEM TO BE SOLVED: To provide an apparatus for inspecting a piping leakage, a chamber for a leakage-inspecting apparatus and a leakage inspection method whereby the apparatus is made compact and simple in the structure, gas leak points can be specified, and a gas leak amount can be quantitatively measured, thereby permitting correct and accurate detection of gas leaks. SOLUTION: The chamber 12 enables to form sealed spaces 19a and 19b to the periphery of a joint of the pipe 11 to be inspected. There are provided a helium cylinder 13 for supplying a helium gas to the pipe 11 to be inspected or to the sealed spaces 19a and 19b, and a helium leak detector 14 for detecting a trace gas leaking from the pipe 11 to be inspected to the sealed spaces 19a and 19b or a trace gas leaking from the sealed spaces 19a and 19b to the pipe 11 to be inspected.
申请公布号 JP2003035622(A) 申请公布日期 2003.02.07
申请号 JP20010220409 申请日期 2001.07.19
申请人 YAMAHA FINE TECHNOLOGIES CO LTD 发明人 TAKAHASHI HIDEMI
分类号 G01M3/20;(IPC1-7):G01M3/20 主分类号 G01M3/20
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