| 摘要 |
PROBLEM TO BE SOLVED: To readily stop the operation of an apparatus surrounded by a chamber with sureness by checking an accessed state of the device and then conducting an interlocking operation. SOLUTION: An interlocking device is provided with a microdifferential manometer 19 for monitoring a difference in pressure inside and outside a thermostatic chamber 9 surrounding an aligner. The chamber 9 is provided with a door 10 for maintenance which can be opened and closed, a door 11 for carrying in a reticle and a door 13 for carrying in a wafer. The state of the chamber 9 is detected by monitoring changes in a difference in pressure inside and outside the chamber 9 according to an opening condition of each door of the chamber 9. When it is determined from the opening state of the door 10 for maintenance that a part of the door 10 which can be opened and closed is in an opened state or the blowing of a temperature control air is weakened, the oscillation of a laser light source 3 is stopped, the transfer of a reticle 4 as an original plate or a wafer 7 as a substrate is stopped, operations of an original plate stage 5 and a substrate stage 8 are stopped, exposure is stopped, or the like.
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