| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro X-ray source which can obtain an electron beam in micron order even a low current value, prevent from deterioration by a heat generation of an emitter chip without a current leakage, and easily control convergence of a beam. SOLUTION: An electron emitter 21 and an electron deriving grid 21 for deriving an electron ejected from the electron emitter 21 within a vacuum sealing tube 26, a device 23 for deriving, accelerating, and converging an electron beam 25 ejected from the electron emitter 21, and a target 24 exposed with the electron beam 25 are arranged on a line. A heating device 33 is also provided in the electron emitter 21. A direct current source 28 of a voltage V2 between the accelerating and converging device 23 and the target 24 is connected to the target 24 as a negative side. A direct current source 27 of a voltage V1 between the target 24 and the electron emitter 21 is connected to the target 24 side as a positive side.
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