发明名称 PHOTOSENSITIVE RESIN COMPOSITION AND METHOD FOR MANUFACTURING RELIEF PATTERN AND METHOD FOR MANUFACTURING HEAT RESISTANT COATING EACH USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a photosensitive resin composition using an aminimide as a photo-base generator which efficiently generates a sufficiently strong base even under low light exposure in combination with a polyamic acid and to provide a method for producing a relief pattern and a method for producing a heat resistant coating. SOLUTION: The photosensitive resin composition contains (a) an aminimide compound which generates a base when irradiated with active light and (b) a polyamic acid. In the method for manufacturing a relief pattern, a coating comprising the photosensitive resin composition is patternwise irradiated with active light and heated at 50-180 deg.C and the unirradiated regions are removed by development. In the method for manufacturing a heat resistant coating, a coating comprising the photosensitive resin composition is irradiated with active light all over and heated at 80-300 deg.C.
申请公布号 JP2003035949(A) 申请公布日期 2003.02.07
申请号 JP20010221579 申请日期 2001.07.23
申请人 HITACHI CHEM CO LTD 发明人 KATOGI SHIGEKI
分类号 G03F7/004;C08G73/10 主分类号 G03F7/004
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