PROTECTION METHOD OF SUBSTRATE SURFACE AND FUNCTIONAL THIN FILM, AND ELECTRO-CONDUCTIVE ANTIREFLECTION MATERIAL WITH PROTECTIVE FILM

摘要

PROBLEM TO BE SOLVED: To provide a protection method of a substrate surface and a functional thin film of materials including those with functional thin film that are followed by a process such as heat treatment, which protects against scratch or dirt and shows sufficient protective function without thickness restriction of the protective film by the optical property of the material or the film structure of the functional film. SOLUTION: A protective film 3, removable by heating, is formed so as to cover a surface of substrate 1 to be protected or a functional thin film 2 formed on the substrate 1. After its formation, the protective film 3 is removed by heating.