| 摘要 |
<p>PROBLEM TO BE SOLVED: To enable a host computer itself of a semiconductor manufacturing system, which controls a semiconductor manufacturing equipment by the host computer and an operating device, to obtain the right to control the semiconductor manufacturing equipment. SOLUTION: This system is provided with a local mode 22 for controlling the semiconductor manufacturing equipment by the operating device and a remote mode 35 for controlling the semiconductor manufacturing equipment by the host computer as operation modes of the semiconductor manufacturing equipment. The local mode 22 has an operator operation mode 23, a maintenance mode 24, and a standby mode 32 as low-order modes. The host computer can changes the mode between the standby mode 32 and remote mode 35 in two ways and shifts the operation mode from the standby mode 32 to the remote mode 35 to obtain the right to control the semiconductor manufacturing equipment by itself.</p> |
