发明名称 Ag ALLOY FILM FOR SHIELDING ELECTROMAGNETIC WAVE, BODY HAVING Ag ALLOY FILM FOR SHIELDING ELECTROMAGNETIC WAVE, AND SPUTTERING TARGET OF Ag ALLOY FOR SHIELDING ELECTROMAGNETIC WAVE
摘要 PROBLEM TO BE SOLVED: To provide an Ag alloy film for shielding an electromagnetic wave, which shows superior abrasion resistance and weathering resistance, and has superior visible light transparency and shielding properties for the electromagnetic wave, by suppressing coagulation of Ag, to provide a body coated with the Ag alloy film, and to provide a sputtering target for manufacturing the Ag alloy film. SOLUTION: The Ag alloy film for shielding the electromagnetic wave superior in Ag coagulation resistance, is comprised of an Ag-based alloy containing at least one element selected from the group consisting of Sc, Y and a rare-earth element. The sputtering target of the Ag alloy for shielding the electromagnetic wave is comprised of the Ag-based alloy containing at least one element selected from the group consisting of Sc, Y and the rare-earth element.
申请公布号 JP2003034828(A) 申请公布日期 2003.02.07
申请号 JP20010351572 申请日期 2001.11.16
申请人 KOBE STEEL LTD 发明人 SATO TOSHIKI;TSUBOTA TAKAYUKI;NAKAI JUNICHI
分类号 G02B1/10;C22C5/06;C23C14/34;H05K9/00 主分类号 G02B1/10
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