| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing a master disk, which can manufacture a high-density and high-accuracy master disk. SOLUTION: The apparatus includes an electron gun, an acceleration voltage applying part which causes the electron gun to emit an electron beam by applying an acceleration voltage thereto, a rotary driving part which rotates a substrate at a substantially constant angular velocity, a movement driving part which moves an irradiation position for the electron beam in the direction relative to the rotating radius of the substrate, an electron beam deceleration part which applies a deceleration voltage to the substrate with the magnitude to decelerate the electron beam, and a control part which changes the deceleration voltage for the electron beam in accordance with the irradiation position for the electron beam in the rotating radius direction of the substrate while substantially keeping the acceleration voltage constant.
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