| 摘要 |
PROBLEM TO BE SOLVED: To reduce the manufacturing time to enhance productivity, realize restriction of a CI value and enhancement in the frequency characteristic of the Q value, or the like as a rough surface is eliminated in a central area forming an excitation electrode, thereby controlling the convex shape, and to mass-produce a plurality of piezoelectric element pieces from a sheet of crystal wafer, without producing variations individually. SOLUTION: One or both surfaces of an AT-cut crystal wafer 3 are blast- processed in a narrow range of the desired width, on both sides along visual outlines 6a, 6b of a piezoelectric element piece, by jetting fine grains 7 from a nozzle 1 of a small diameter, to manufacture the piezoelectric element piece of a sectional convex form. Further, masks 18, 22, 24, having opening parts 19, 23, 25 of a desirable width along the visual outlines of the piezoelectric element piece, are provided on one or both surfaces of the AT cut crystal wafer 3. Using the blast-processing by jetting fine grains 21 from a nozzle 20 of large diameter, the piezoelectric element piece of a sectional convex shape is manufactured similarly. |
