| 发明名称 |
TESTING METHOD AND APPARATUS OF FUNCTION IN FINE STRUCTURE ELEMENT |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for testing the function of a fine structure element. SOLUTION: The is a method and an apparatus for testing the function of a fine structure element. The fine structure element is excited to test the release and/or mechanical properties, and particles that are released or reflected by the fine structure element are detected and evaluated.
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| 申请公布号 |
JP2003035752(A) |
申请公布日期 |
2003.02.07 |
| 申请号 |
JP20020080163 |
申请日期 |
2002.03.22 |
| 申请人 |
ETEC SYSTEMS INC |
发明人 |
BRUNNER MATTHIAS;FEUERBAUM HANS-PETER;FROSIEN JUERGEN DR |
| 分类号 |
G01R31/26;B81C99/00;G01M11/00;G01R31/302;G01R31/305;G09G3/00;H01J9/42;H01L21/66;H01L29/66;H01S5/00;(IPC1-7):G01R31/302;B81C5/00 |
主分类号 |
G01R31/26 |
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