| 摘要 |
A chamber (2) is made in a solid support (3) and contains a pyrotechnic charge (6). The chamber is partially defined by a deformable membrane (4) such that the gases emitted by burning the pyrotechnic charge allow the volume of the chamber to increase by deforming the membrane whilst keeping the solid walls of the chamber intact. The chamber defines a hermetic space when it is expanded. The pyrotechnic charge is nitrocellulose-based. The volume of the chamber is less than 1cm<3>. The charge density (ratio between mass of pyrotechnic charge over the volume of the chamber) is between 0.01 and 0.1 mu g/mm<3>. A heating conducting track is placed on the pyrotechnic charge and is only in contact with the charge. The chamber contains a hollow cavity in the support and the pyrotechnic charge is in the form of a film coating this cavity, or as a coating for a heating conducting wire (5) crossing the chamber. The wire has a diameter of between 10 and 100 mu m. The flexible membrane can inflate or unfold as the gases from the charge expand and it is made of Teflon. Deformation of the membrane moves a solid piece which pivots to close a fluid pipe. An Independent claim is also included for a microsystem containing such a microactuator, where the flexible membrane is placed in an annular space such as a throat; the pyrotechnic charge is in an annular space of smaller diameter, connected to the membrane space by an opening, and a solid plate piece covered with an elastic membrane presses against the support to cap the membrane space and obstruct a fluid pipe. Alternatively, the membrane, which may be bistable, deforms to block the pipe. The element which blocks the pipe is surmounted with a flexible protrusion which ensures a good seal when the pipe is closed.
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