QUARTZ TYPE OPTICAL WAVEGUIDE CIRCUIT AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To shorten the manufacturing time for a quartz type optical waveguide circuit while sufficiently keeping the spot size conversion function. SOLUTION: In the quartz type optical waveguide circuit which is provided with a lower clad layer 12 mounted on a substrate 11, a core 13a for guiding light formed from a core layer 13 mounted on the lower clad layer 12 and an upper clad layer 14 which covers the lower clad layer 12 and the core 13a, a core 13b of input/output part of which the thickness is formed larger than that D of the inner core and a tapered part which connects the core 13b of the input/output part and the inner core 13a, a core layer of the input/output part is formed at the side face of the core 13b of the input/output part and the thickness T of the layer of the input/output part which comes into contact with the side face of the core 13b of the input/output part of the core layer of the input/output part is smaller than the thickness H of the core 13b of the input/output part.