发明名称 INSPECTION METHOD AND APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide an inspection method for accurately grasping a junction state at the junction regions of conductive materials that are connected electrically. SOLUTION: A constant current passing junction regions CA is allowed to flow for specific time between first and second conductive materials 1 and 2 from a power supply section 4 through probes 4a and 4b and the temperature distribution of the junction regions CA is measured through a sermoviewer 3, and a temperature distribution image including at least the junction regions CA is generated based on the measurement result and the image can be displayed at a display section 5e, thus accurately grasping and evaluating the junction state at the junction regions CA based on the temperature distribution image that is displayed at the display section 5a, namely in what state in the junction regions CA the first and second conductive materials 1 and 2 are joined.
申请公布号 JP2003035690(A) 申请公布日期 2003.02.07
申请号 JP20010222939 申请日期 2001.07.24
申请人 TAIYO YUDEN CO LTD 发明人 UENO MITSUO
分类号 G01R31/02;G01J5/48;G01N25/18;G01N25/72;H01L21/60;H05K3/34;(IPC1-7):G01N25/72 主分类号 G01R31/02
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