| 摘要 |
Spring elements in the form of screw or spiral springs are made from mono-crystalline silicon. An Independent claim is also included for the production of the spring elements comprising preparing a starting body made from mono-crystalline silicon, and mechanically, thermally and/or chemically removing the starting body until excess silicon is removed and the remaining silicon has the required screw or spiral spring form. Preferred Features: The mono-crystalline silicon is coated with silicon dioxide, silicon oxynitride, silicon nitride, silicon carbide or a polymer. |
