| 摘要 |
<p>A method and apparatus for surface roughness measurement are provided, wherein the method and apparatus utilize a light source directing a light beam at an incidence angle θ onto a surface to be measured; a light detector measuring the intensity I(θ) of at least a portion of said light beam reflected from said surface; said light beam movable such that said incidence angle θ is variable over a sequence of angles (θi ...θn) between grazing and normal incidence to said surface, where i is the index counter of the incidence angle in the sequence from O to n, and n is the number of incidence angles; and a processing unit for recording and converting values of said incidence angles and values of intensity signals from said light detector into a surface roughness value for said surface.</p> |
