| 摘要 |
<p>A positive type radiosensitive composition comprising the following components (A) to (C): (A) at least one compound selected from the group consisting of a hydrolyzable silane compound represented by the general formula (1): (R1)pSi(X)4-p (1) wherein R1 represents a non-hydrolyzable organic group having 1 to 12 carbon atoms, X represents a hydrolyzable group, and p represents an integer of 0 to 3, a hydrolyzate thereof and a condensed product therefrom; (B) an agent generating an acid by the irradiation with a light; and (C) a basic compound. The use of the above composition allows the production of a cured product excellent in the precision of a pattern and the like, and the above composition can be used as a material for forming an optical wave guide.</p> |
