发明名称 Method for determining deficient processes and deficient processing stations
摘要 A method determines the deficient processes and deficient processing stations in the manufacture of a product fabricated by lots through a plurality of processes performed by a plurality of processing stations. From a plurality of lots, the good lots are distinguished from the bad lots. By using the process history of each good and bad lot, a good lot ratio and a bad lot ratio that are respectively produced by each process performed by one of the processing stations are calculated. The processes/processing stations are arranged according to a decreasing order of their bad lot ratios. The most probable deficient processes/processing stations are those which are arranged at the top of the arranged order.
申请公布号 US2003027362(A1) 申请公布日期 2003.02.06
申请号 US20010922437 申请日期 2001.08.03
申请人 YANG WEN FA;LIU MING-HUA;KUO ERIC C.H.;WU JASMINE 发明人 YANG WEN FA;LIU MING-HUA;KUO ERIC C.H.;WU JASMINE
分类号 H01L21/66;(IPC1-7):H01L21/66 主分类号 H01L21/66
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