发明名称 |
Method for determining deficient processes and deficient processing stations |
摘要 |
A method determines the deficient processes and deficient processing stations in the manufacture of a product fabricated by lots through a plurality of processes performed by a plurality of processing stations. From a plurality of lots, the good lots are distinguished from the bad lots. By using the process history of each good and bad lot, a good lot ratio and a bad lot ratio that are respectively produced by each process performed by one of the processing stations are calculated. The processes/processing stations are arranged according to a decreasing order of their bad lot ratios. The most probable deficient processes/processing stations are those which are arranged at the top of the arranged order.
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申请公布号 |
US2003027362(A1) |
申请公布日期 |
2003.02.06 |
申请号 |
US20010922437 |
申请日期 |
2001.08.03 |
申请人 |
YANG WEN FA;LIU MING-HUA;KUO ERIC C.H.;WU JASMINE |
发明人 |
YANG WEN FA;LIU MING-HUA;KUO ERIC C.H.;WU JASMINE |
分类号 |
H01L21/66;(IPC1-7):H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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