发明名称 System and method for controlling deposition parameters in producing a surface to tune the surface's plasmon resonance wavelength
摘要 A system and method are disclosed which enable deposition parameters to be controlled in producing a metal surface to tune the localized surface plasmon resonance (LSPR) wavelength of such metal surface to a desired wavelength. For example, the surface produced may be used as an enhancement surface within a surface-enhanced spectroscopy process, wherein such surface is produced having a LSPR wavelength that provides the maximum extinction of a particular excitation light. In one embodiment, a metal is deposited onto a substrate, while controlling one or more deposition parameters to tailor the LSPR of the resulting metal surface to a desired wavelength. In one embodiment, the substrate is smooth, and does not require a mask prearranged thereon for controlling the LSPR wavelength. Rather, deposition parameters, such as temperature of the substrate, deposition rate, and film thickness may be controlled to effectively tune the LSPR wavelength of the metal surface.
申请公布号 US2003026900(A1) 申请公布日期 2003.02.06
申请号 US20010852992 申请日期 2001.05.10
申请人 ZYVEX CORPORATION 发明人 WEIMER WAYNE A
分类号 G01N21/65;(IPC1-7):C23C16/00 主分类号 G01N21/65
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