Apparatus for correlating an optical image and a SEM image and method of use thereof

摘要

An instrument system is controlled to acquire an optical image of an object, with the optical image defining a first coordinate system The object is positioned in a second coordinate system and a point in the optical image is selected. The object is repositioned so that a point on the object corresponding to the selected point in the optical image is positioned at a predetermined point in the second coordinate system. Alternatively, movement of the object causes an indicia on the optical image to move to a point thereon corresponding to the point on the object that is positioned at the predetermined point in the second coordinate system.