发明名称 CO-FIRED PIEZO DRIVER AND METHOD OF MAKING FOR A RING LASER GYROSCOPE
摘要 A multi-layer PZT comprises a plurality of stacked ceramic layers. The stack of ceramic layers includes a top ceramic layer on which negative and positive contacts for electrically coupling the PZT to external circuitry are formed. The stack of ceramic layers also includes at least one negatively poled ceramic layer having a negative conductive pattern formed thereon and at least one positively poled ceramic layer having a positive conductive pattern formed thereon. The PZT also includes a negative pattern interconnect for electrically connecting the negative contact and the negative conductive pattern and a positive pattern interconnect for electrically connecting the positive contact and the positive conductive pattern. The multi-layer PZT can be fabricated using a ceramic co-firing process.
申请公布号 WO03010835(A2) 申请公布日期 2003.02.06
申请号 WO2002US22910 申请日期 2002.07.18
申请人 HONEYWELL INTERNATIONAL INC. 发明人 SCHOBER, CHRISTINA, M.;SITTLER, DANIEL, L.;MORTENSON, DOUGLAS, P.
分类号 G01C19/66;H01L41/047;H01L41/083;H01L41/187;H02N2/00 主分类号 G01C19/66
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