发明名称 Method for transferring element, method for producing element, integrated circuit, circuit board, electro-optical device, IC card, and electronic appliance
摘要 A peeling layer 2 is formed on an element-forming substrate 1, an element-forming layer 3 including an electrical element is formed on the peeling layer, the element-forming layer is joined by means of a dissolvable bonding layer 4 to a temporary transfer substrate 5, the bonding force of the peeling layer is weakened to peel the element-forming layer from the element-forming substrate, the layer is moved to the temporary transfer substrate 5 side, a curable resin 6 is applied onto the element-forming layer 3 which has been moved onto the temporary transfer substrate 5, the resin is cured to form a transfer substrate 6, and the bonding layer 4 is dissolved to peel the temporary transfer substrate 5 from the transfer substrate 6, resulting in a structure in which a transfer substrate is formed directly on the element-forming layer 3. The separation and transfer technique can be used to form a substrate with better flexibility and impact resistance directly on a semiconductor element, without an adhesive layer on the semiconductor device that is produced.
申请公布号 US2003024635(A1) 申请公布日期 2003.02.06
申请号 US20020201721 申请日期 2002.07.24
申请人 SEIKO EPSON CORPORATION 发明人 UTSUNOMIYA SUMIO
分类号 H01L21/20;H01L21/336;H01L21/683;H01L21/77;H01L21/84;H05K3/20;(IPC1-7):B32B31/00 主分类号 H01L21/20
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