Multiple output inertial sensing device

摘要

An inertial sensor includes a plurality of sense elements disposed upon a silicon wafer. Each of the sense elements senses a different inertia range. The sense elements are electrically connected to a common signal conditioning circuit that generates an output signal for each of the sense elements. The signal conditioning circuit has an output that is electrically connected to at least one control system and provides output signals in different ranges to the control system.