APPARATUS FOR PROCESSING A MICROELECTRONIC WORKPIECE INCLUDING A WORKPIECE CASSETTE INVENTORY ASSEMBLY

摘要

An apparatus is set forth for providing access to individual workpiece positions in a microelectronic workpiece cassette. The assembly comprises a workpiece cassette inventory assembly (160) having a plurality of cassette inventory cassette supports (160a-d), which are selectively aligned with the staging cassette supports (220) of a workpiece staging assembly (170). This allows a plurality of cassettes to be separately indexed, thereby enabling the workpiece staging assembly to access multiple cassettes and process a larger number of microelectronic workpieces between loading/unloading cycles that require user activity.