SILICON MONOXIDE SINTERED PRODUCT AND METHOD FOR PRODUCTION THEREOF
摘要
A method for producing a silicon monoxide sintered product which comprises effecting a sintering by hot press forming under a pressure of 15 MPa or more at a temperature of 1200 to 1350˚C, to thereby provide a sintered product having a bulk density of 1.68 g/cm<sp>3</sp> or more; and the method which further comprises using a press mold having an outer mold of integral type and, disposed inside it, plural inner molds divided with spaces packed with cushioning sheets, to thereby provide a sintered product having a diameter of 100 mm or more and a bulk density being 95 % or more of its true density and 2.13 g/cm<sp>3</sp> or more. The method allows the production of a silicon monoxide sintered product exhibiting a uniform structure, good mechanical processability and reduced splashing, which is required to a silicon monoxide material for vapor deposition, and such a product further having a diameter of 100 mm or more and a shape matching to a target holder, which is required to a silicon monoxide material for a sputtering target, with stability and good productivity.
