One-transistor memory cell configuration and method for its fabrication

摘要

One-transistor memory cell arrangement and method for fabricating it In a method for fabricating a dynamic memory cell in a semiconductor substrate having a trench capacitor 1 and a selection transistor 2 and a semiconductor memory having such a memory cell, a dielectric insulator layer 17, 201 is formed between the selection transistor and the trench capacitor, a first electrode region 203 of the selection transistor essentially being arranged above a block-type inner electrode 102 of the trench capacitor and being connected to said electrode via a contact opening 213 in the dielectric insulator layer, said contact opening being provided with an electrically conductive filling layer 214.