发明名称 |
Layer structure application onto substrates comprises arranging substrate plates in a stack, swiveling the plates out of the horizontal plane, applying melt and precipitating layer |
摘要 |
A process for producing layer structures on substrates using liquid phase epitaxy comprises arranging a number of substrate plates (2) into a stack so they are parallel, then swiveling the plates out of the horizontal. A melt or a solution is applied to the stack to form a layer material and the stack is then swiveled back to the horizontal. A layer is then precipitated onto the plates from the melt or the solution, then the plates are swiveled out of the horizontal to let the melt or solution run off.
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申请公布号 |
DE10135574(A1) |
申请公布日期 |
2003.02.06 |
申请号 |
DE20011035574 |
申请日期 |
2001.07.20 |
申请人 |
OSRAM OPTO SEMICONDUCTORS GMBH |
发明人 |
GROENNINGER, GUENTHER;HEIDBORN, PETER |
分类号 |
C30B19/06;(IPC1-7):C30B19/06 |
主分类号 |
C30B19/06 |
代理机构 |
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