发明名称 Layer structure application onto substrates comprises arranging substrate plates in a stack, swiveling the plates out of the horizontal plane, applying melt and precipitating layer
摘要 A process for producing layer structures on substrates using liquid phase epitaxy comprises arranging a number of substrate plates (2) into a stack so they are parallel, then swiveling the plates out of the horizontal. A melt or a solution is applied to the stack to form a layer material and the stack is then swiveled back to the horizontal. A layer is then precipitated onto the plates from the melt or the solution, then the plates are swiveled out of the horizontal to let the melt or solution run off.
申请公布号 DE10135574(A1) 申请公布日期 2003.02.06
申请号 DE20011035574 申请日期 2001.07.20
申请人 OSRAM OPTO SEMICONDUCTORS GMBH 发明人 GROENNINGER, GUENTHER;HEIDBORN, PETER
分类号 C30B19/06;(IPC1-7):C30B19/06 主分类号 C30B19/06
代理机构 代理人
主权项
地址